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54 IBM and Lam's new partnership paves the way toward sub-1nm logic using High-NA EUV — Albany lab to pioneer dry resist process integration

Tom's Hardware
Tom's Hardware 3 place · today 13:14 EDT

IBM and Lam's new partnership paves the way toward sub-1nm logic using High-NA EUV — Albany lab to pioneer dry resist process integration

Under the new agreement, the focus will shift to validating full process flows for nanosheet and nanostack device architectures and backside power delivery.

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