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90 IBM and Lam Research team up on High NA EUV dry resist to push chip scaling past 1nm

Tom's Hardware
Tom's Hardware 2 place · today 10:48 EDT

IBM and Lam Research team up on High NA EUV dry resist to push chip scaling past 1nm

The two companies have worked together for more than a decade, with IBM unveiling what it described as the world's first 2nm node chip in 2021 as part of the partnership.

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